Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects
نویسندگان
چکیده
Secondary ion mass spectrometry (SIMS) data from diamond like carbon (DLC) often give inaccurate, imprecise results when methods tailored for silicon are applied. This work is a guide to accurate and precise future SIMS analyses of DLC.
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ژورنال
عنوان ژورنال: Journal of Analytical Atomic Spectrometry
سال: 2021
ISSN: ['1364-5544', '0267-9477']
DOI: https://doi.org/10.1039/d0ja00375a